MX61

FEATURES

SPEC

Semiconductor/FPD Inspection Microscope Specifications MX61L MX61
Optical System UIS2 Optical System (Infinity-corrected)
Microscope Frame Observation Method BF/DF/DIC/KPO*/FL
Reflected/Transmitted Reflected/Transmitted
Illuminator Microscope Frame All-in-one (BF, DF + 1 Option)
Illumination System Reflected Light 100 W Halogen/100 W Mercury/75 W Xenon
Transmitted Light Fiber Light Guide
Focus Motorized/Manual Manual
Stroke 32 mm
Resolution/Fine Adjustment Sensitivity Fine Stroke per Rotation 0.1 mm
Maximum Specimen Height 30 mm
Revolving Nosepiece Motorized Type Sextuple for BF/DIC Quintuple for BF/DF/DIC Centerable Quintuple for BF/DF/DIC Sextuple for BF/DF/DIC
Manual Type -
Stage Stroke 14x12 inch Right Handle Stage: 356(X)x305(Y)mm (Transmitted Light Range 356x284 mm) 8x8 inch Right Handle Stage:
210(X)x210(Y)mm (Transmitted
Light Range 189x189 mm)
6x6 inch Right Handle Stage:
158(X)x158(Y)mm
Observation Tube Widefield (Field Number 22) Inverted Image Binocular/Trinocular Observation Tube
Erect Image Trinocular Observation Tube
Super Wide Field (Field Number 26.5) Inverted Image Trinocular Observation Tube
Erect Image Tilting Trinocular Observation Tube
Option Unit IR Unit/Motorized Stage/Wafer Loader
Dimensions 710(W)x843(D)x507(H)mm
(in Standard Combination)
509(W)x843(D)x507(H)mm
(in Standard Combination)
Weight 51 kg (in Standard Combination) 40 kg (in Standard Combination)
Remark *Simple Polarized Light Observation
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