SEM

What is Tabletop SEM?

FEATURES

SPEC

Performance
Model SNE-4500M SNE-3200M SNE-3000MS
Resolution 5nm 15nm 15nm
Magnification 100,000x 60,000x 60,000x
Detector SE SE/BSE SE
Vacuum High High/Low High
Electron Gun Pre-centered Tungsten Filament Cartridge
Accelerating Voltage 1~30kV (1/5/10/15/20/30 - 6 Step)
Stage 5-axis
(X, Y : 40mm, R-axis : 360°,
Z : 0~35mm, T : 0~45°)
3-axis
(X, Y : 35mm, R-axis : 360°)
3-axis
(X, Y : 35mm, R-axis : 360°)
Max. Sample Size 80mm(D) x 35mm(H) 70mm(D) x 30mm(H)
Frame Memory Live scan mode : 320 x 240
Full scan mode : 640 x 450
Photo mode 1 : 1,280 x 960
Photo mode 2 : 2,560 x 1,920
Photo mode 3 : 5,120 x 3,840
Automation Function Start, Focus, Stigmator, Contrast & Brightness
Image Fomat BMP, JPEG, PNG, TIFF
Vacuum Pump Rotary + Turbo Molecular Pump (Full Automation System)
블로그