SEM
What is Tabletop SEM?
FEATURES
SPEC
| Performance | |||
|---|---|---|---|
| Model | SNE-4500M | SNE-3200M | SNE-3000MS |
| Resolution | 5nm | 15nm | 15nm |
| Magnification | 100,000x | 60,000x | 60,000x |
| Detector | SE | SE/BSE | SE |
| Vacuum | High | High/Low | High |
| Electron Gun | Pre-centered Tungsten Filament Cartridge | ||
| Accelerating Voltage | 1~30kV (1/5/10/15/20/30 - 6 Step) | ||
| Stage | 5-axis (X, Y : 40mm, R-axis : 360°, Z : 0~35mm, T : 0~45°) |
3-axis (X, Y : 35mm, R-axis : 360°) |
3-axis (X, Y : 35mm, R-axis : 360°) |
| Max. Sample Size | 80mm(D) x 35mm(H) | 70mm(D) x 30mm(H) | |
| Frame Memory |
Live scan mode : 320 x 240 Full scan mode : 640 x 450 Photo mode 1 : 1,280 x 960 Photo mode 2 : 2,560 x 1,920 Photo mode 3 : 5,120 x 3,840 |
||
| Automation Function | Start, Focus, Stigmator, Contrast & Brightness | ||
| Image Fomat | BMP, JPEG, PNG, TIFF | ||
| Vacuum Pump | Rotary + Turbo Molecular Pump (Full Automation System) | ||
